Langer IC Scanner IC S 103

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1. Board measuring system with spectrum analyzer

2. Linear positioning system

3. Video inspection microscope

4. Computer and software

ICS 103

Application:

Scanning the chip surface with ICR near-field microprobes

(surface scan method acc. IEC 61967-3, part 3)

During development of new IC designs
Troubleshooting electric and magnetic coupling in ICs (volum scanning)
Optimization of the pin assignment (pin scanning)

Property:

The IC scanner can hold ICR near-field microprobes for H and E field. The probes can be moved on the chip surface along all three axes and rotated around the z-axis. The open top of the scanner allows the user to check the position of the probe tip visually through a video microscope.

Parameter:

Axes	x	y	z	α rotation
max. measuring range	25 mm	25 mm	25 mm	180 º
Accuraty	10 µm	10 µm	100 µm	1º
Max. speed	5 mm/s	5 mm/s	5 mm/s	90 º/s

Control	USB
Supply voltage	110 V / 230 V
Current consumption	0.2 A
Size / Weight	[320 x 220 x 270] mm / 4.35 kg

Controlled via PC / laptop through the ChipScan software.

Software:

Zero position
manual or script-based measuring paths/probe movement
visualisation of the measuring results in 2D or 3D
output as excel data

IC Scanner ICS 103

: IC Scanner ICS 103

Scope delivery:

IC-scanner with motor control unit
Control and supply unit with universalholder-DUT or ground plane
Software ChipScan for automatic measurements

optional Accessories:

ICR near-field microprobes for E and H field
Video microscope with holder

Flyer scanner ICS 103 (pdf, 348 kb)