Langer IC Scanner FL S 102

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1. Board measuring system with spectrum analyzer

2. Linear positioning system

3. Video inspection microscope

4. Computer and software

FLS 102

Application:

Scanning the chip surface with ICR near-field microprobes
During development of new IC designs
Troubleshooting electric and magnetic coupling in ICs
Optimization of the pin assignment

Property:

The IC scanner can hold ICR near field microprobes for H and E field. The probes can be moved on the chip surface along all three axes and rotated around the z-axis. The open top of the scanner allows the user to check the position of the probe tip visually through a microscope.

Parameter:

Axes	x	y	z	α rotation
max. measuring range	200 mm	150 mm	50 mm	+/- 180º
min. travel path	20 µm	20 µm	20 µm	+/- 1.0º
Travel speed	500 mm/s	500 mm/s	200 mm/s	90º/s

Control	USB
Supply voltage	110 V / 230 V
Current consumption	150 W
Size / Weight	[325 x 450 x 450] mm / 12 kg

Controlled via PC / laptop through the ChipScan software.

Software:

Zero position
manual or script-based measuring paths/probe movement
graphic representation of the measuring results in 2D or 3D
output as excel data

IC Scanner FLS 102

: IC Scanner FLS 102

Scope delivery:

IC scanner with Motor Control Unit, rotation ring
Supply unit for PCB with DUT-holder or
GND Plane with connection board

Zubehör:

Optical control and video microskop
Software package “ChipScan”
ICR near-field microprobes
RF mini probes

Flyer scanner FLS 102 (pdf, 365 kb)